Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices

A micro-electro-mechanical system (MEMS) device comprising:

• a first substrate;
• an actuator layer;
• a second substrate;
• an anchor subassembly in the actuator layer;
• wherein the anchor subassembly includes:
• a first portion of the anchoring assembly between the top substrate and the bottom substrate;
• the first portion of the anchoring assembly rigidly connected to the top substrate;
• and the first portion of the anchoring assembly rigidly connected to the bottom substrate;
• a second portion of the anchoring assembly between the top substrate and the bottom substrate;
• the second portion of the anchoring assembly rigidly connected to the top substrate;
• the second portion of the anchoring assembly being an anchoring point for the MEMS device;
• and
• a flexible element to couple the first portion and the second portion;
• the flexible element providing the electrical connection between the first portion and the second portion.

An assembly for anchoring a micro-electro-mechanical system (MEMS) device, the assembly comprising:

• a top substrate;
• a bottom substrate substantially parallel to the top substrate;
• a first portion of the anchor between the top substrate and the bottom substrate;
• the first portion of the anchor rigidly connected to the top substrate;
• and the first portion of the anchor rigidly connected to the bottom substrate;
• a second portion of the anchor between the top substrate and the bottom substrate;
• the second portion of the anchor rigidly connected to the bottom substrate;
• the second portion of the anchor being an anchoring point for the MEMS device;
• and
• a substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor;
• the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.

A micro-electro-mechanical system (MEMS) device, comprising:

• a first substrate;
• an actuator layer;
• a second substrate;
• an anchor subassembly in actuator layer;
• wherein the anchor subassembly includes:
• a first portion of the anchor between the top substrate and the bottom substrate;
• the first portion of the anchor rigidly connected to the top substrate;
• and the first portion of the anchor rigidly connected to the bottom substrate;
• a second portion of the anchor between the top substrate and the bottom substrate;
• the second portion of the anchor rigidly connected to the bottom substrate;
• the second portion of the anchor being an anchoring point for the MEMS device;
• and
• a substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor;
• the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.