Fabrication method of semiconductor device

A fabrication method of a semiconductor device, comprising the steps of:

• (a) preparing a semiconductor wafer;
• (b) forming a first conductive film for gate electrode over the main surface of the semiconductor wafer;
• (c) forming a first insulating film over the first conductive film;
• (d) patterning the first insulating film;
• (e) after the step (d), correcting the size of the first insulating film pattern over the semiconductor wafer;
• and
• (f) after the step (e), etching the first conductive film with the first insulating film pattern as an etching mask to form the gate electrode,
• wherein in the step (e),
• an etchant for etching the first insulating film pattern is supplied to the main surface of the semiconductor wafer from an etchant supply means while rotating the semiconductor wafer and moving thereabove the etchant supply means from the peripheral side to the central side of the main surface of the semiconductor wafer,
• the moving speed of the etchant supply means is changed between the peripheral side and central side of the semiconductor wafer, and
• the moving speed of the etchant supply means is controlled, depending on the distribution, over the semiconductor wafer, of a taper amount of the gate electrode generated during the step (f).