Graytone mask and method thereof
AssigneeHoya Corporation
InventorShigenori Nozute
Life of this patent
Estimating the term…
Abstract
A transmissivity controlled film 12 (CrO or the like), a transmissivity reduced film 13 (Cr or the like), and a resist film 14, for instance, are sequentially formed on, e.g., a transparent substrate 11. A resist is removed from an area (an area C) where a light-transmission section is to be formed, and the transmissivity reduced film 13 and the transmissivity controlled film 12 are removed from the area, thereby forming a light-transmission section. Next, a resist is removed from an area (an area A) in which a graytone section is to be formed, thereby removing the transmissivity reduced film 13 from that area, to thereby form a graytone section. Thus, a graytone mask is manufactured.
Claims37
A graytone mask having an opaque section, a light transmission section, and a graytone section, wherein said graytone section permits transmission of a portion of an exposure light so that an area of photoresist film exposed with the graytone mask, corresponding to the graytone section, upon development, remains with a thickness different from an area corresponding to the opaque section or the light transmission section, said mask comprising:
- a transparent substrate;
- a semi-transparent film having a transmissivity of 20 to 50% of the exposure light;
- and
- an opaque film which substantially reduces the transmission of the exposure light,
- wherein the semi-transparent film comprises a different material than the opaque film,
- wherein the opaque section of the mask comprises the semi-transparent film and the opaque film formed on the substrate,
- wherein the graytone section of the mask comprises the semi-transparent film formed on the substrate.
A graytone mask blank for use in manufacturing the graytone mask, said graytone mask having an opaque section, a light transmission section, and a graytone section, wherein said graytone section permits transmission of a portion of an exposure light so that an area of photoresist film exposed with the graytone mask, corresponding to the graytone section, upon development, remains with a thickness different from an area corresponding to the opaque section or the light transmission section, said graytone mask blank comprising:
- a transparent substrate;
- a semi-transparent film which controls the transmission of the exposure light;
- and
- an opaque film which substantially reduces the transmission of the exposure light,
- wherein the semi-transparent film comprises a different material from the opaque film and has a light transmissivity of 20 to 50%.
A graytone mask having an opaque section, a light transmission section, and a graytone section, wherein said graytone section permits transmission of a portion of an exposure light so that an area of photoresist film exposed with the graytone mask, corresponding to the graytone section, upon development, remains with a thickness different from an area corresponding to the opaque section or the light transmission section, said mask comprising:
- a transparent substrate;
- a semi-transparent film which controls the transmission of the exposure light;
- an opaque film which substantially reduces the transmission of the exposure light;
- and
- an etching stopper film,
- wherein the semi-transparent film comprises a different material than the opaque film,
- wherein the opaque section of the mask comprises the semi-transparent film, the opaque film and the etching stopper film formed on the substrate, said etching stopper film being between the semi-transparent film and the opaque film,
- wherein the graytone section of the mask comprises the semi-transparent film.
A graytone mask blank for use in manufacturing a graytone mask, said graytone mask having an opaque section, a light transmission section, and a graytone section, wherein said graytone section permits transmission of a portion of an exposure light so that an area of photoresist film exposed with the graytone mask, corresponding to the graytone section, upon development, remains with a thickness different from an area corresponding to the opaque section or the light transmission section, said graytone mask blank;
- comprising:
- a transparent substrate;
- a semi-transparent film which controls the transmission of the exposure light;
- an opaque film which substantially reduces the transmission of the exposure light;
- and
- an etching stopper film formed between the semi-transparent film and the opaque film,
- wherein the semi-transparent film comprises a different material than a material of the opaque film and has a light transmissivity of 20 to 50%.
Dependencies are inferred from the claim text.