Ferroelectric capacitor and ferroelectric memory with Ir-Ru alloy electrode and method of manufacturing the same

A method of fabricating a ferroelectric memory, comprising:

• forming a plurality of memory cells on a substrate, wherein each memory cell includes
• a first electrode comprising an alloy of Ir and Ru, wherein the alloy is a multi-phase alloy with a first phase containing Ir and Ru and a second phase containing Ir and Ru, the alloy having a mixture of grains of an alpha (α) phase of an Ir-rich solid solution and a beta (β) phase of a Ru-rich solid solution,
• a ferroelectric layer disposed on the first electrode, and
• a second electrode disposed on the ferroelectric layer.