US 7,744,328 B2 · Apparatus for aligning a tray and tray holder

Abstract

An apparatus for aligning a tray and tray holder, including a vertically positioned tray formed with coupling holes and a tray holder having coupling arms to couple with the coupling holes, and to prevent the bending of the tray and the tray holder. The tray includes a substrate frame that can receive a substrate, and the tray holder is coupled with a drive shaft for transferring the tray in the vertical position to a mask for vapor deposition. One end of a plurality of guide shafts securely contacts the rear side of the tray holder to prevent bending of the tray holder. The tray can have magnetic attaching members and the tray holder can have supporting members corresponding to the attaching members. The supporting members can magnetically couple with the attaching members in a position determined by corresponding grooves or protrusions to align the tray and tray holder.

Claims25

Dependent claims

An apparatus for aligning a tray and tray holder, comprising:

a tray capable of receiving a substrate;
a plurality of coupling holes formed in the tray, one of the plurality of coupling holes having a coupling protrusion;
a tray holder;
and
a plurality of coupling arms coupled with the tray holder and extending away from the tray holder, one of the plurality of coupling arms corresponding to one of the plurality of coupling holes and having a coupling groove to engage the coupling protrusion,
wherein the tray is coupled with the tray holder and can be transferred while positioned vertically when the coupling groove engages the coupling protrusion.

3 more elements

Dependencies are inferred from the claim text.

Apparatus for aligning a tray and tray holder

Life of this patent

Apparatus for aligning a tray and tray holder

Life of this patent

Abstract

Claims25