Loading patent…
AssigneePraxair S.T. Technology, Inc.
InventorsAndrew C. Perry, Holger J. Koenigsmann, David E. Dombrowski, Thomas J. Hunt
Estimating the term…
The method manufactures high-purity ferromagnetic sputter targets by cryogenic working the sputter target blank at a temperature below at least −50° C. to impart at least about 5 percent strain into the sputter target blank to increase PTF uniformity of the target blank. The sputter target blank is a nonferrous metal selected from the group consisting of cobalt and nickel; and the nonferrous metal has a purity of at least about 99.99 weight percent. Finally, fabricating the sputter target blank forms a sputter target having an improved PTF uniformity arising from the cryogenic working.
A high-purity nonferrous sputter target, the nonferrous sputter target having a sputter source selected from the group consisting of cobalt, the sputter source having a top surface for sputtering metal atoms onto a substrate, a side edge, a purity of at least about 99.99 weight percent, a single phase crystallographic structure, and a uniform PTF, the PTF uniformity being less than about 3.5 percent of the average PTF for the formula:
Dependencies are inferred from the claim text.