Substrate processing apparatus with removable component module

A substrate processing apparatus comprising:

• a frame;
• a housing connected to the frame;
• an access system connected to the frame and forming an access through which substrates are moved in and out of the housing;
• and
• at least one substrate processing device connected to the frame for processing substrates and being at least partially positioned in the housing, the at least one substrate processing device comprising a substrate transport apparatus;
• wherein the frame comprises a movable portion, movable relative to the housing, to which the access system and substrate processing device are connected so that movement of the movable portion causes separation of the access system and the at least one substrate processing device as a unit from an installed position;
• wherein the substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus each having a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame, the positioning features of each respective substrate transport apparatus being controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the positioning features of the other ones of the different interchangeable substrate transport apparatus, wherein the at least one substrate processing device comprises both the substrate transport apparatus and a substrate processing tool, the substrate transport apparatus and substrate processing tool both being mounted to the movable portion and defining a substrate automation engine, wherein movement of the movable portion relative to the housing moves the automation engine as a unit relative to the housing, wherein the substrate processing tool is selectable from a number of different interchangeable substrate processing tools each having a processing tool predetermined reference datum and processing tool positioning features for positioning the substrate processing tool relative to the frame, the processing tool positioning features of each substrate processing tool being controllably located relative to its processing tool predetermined reference datum to be in a rep eatable location with substantially no variance between the different interchangeable substrate processing tools.