Immersion exposure technique
AssigneeCanon Kabushiki Kaisha
InventorHitoshi Nakano
Life of this patent
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Abstract
An exposure apparatus which exposes a substrate to a pattern of an original via a projection optical system, with a gap between the projection optical system and the substrate being filled with liquid. The apparatus includes an ejection member configured to eject a gas through an ejection port outside the liquid, and a suction member configured to suck the gas through a suction portion outside the liquid. The suction port is arranged to be more distant than the ejection port from a center of an optical axis on a final surface of the projection optical system.
Claims15
An exposure apparatus having a projection optical system configured to project a pattern of an original onto a substrate and exposing the substrate to light with a gap between the substrate and a final surface of the projection optical system being filled with liquid, the apparatus comprising:
- a supply unit having a supply port and configured to supply the liquid to the gap through the supply port;
- a recovery unit having a recovery port outside the supply port and configured to recover the liquid from the gap through the recovery port;
- an ejection unit having an ejection port and configured to eject a gas through the ejection port outside the liquid filled in the gap;
- and
- a suction unit having a suction port and configured to suck the gas through the suction port outside the liquid filled in the gap,
- wherein the suction port is arranged outside the ejection port.
An exposure apparatus having a projection optical system configured to project a pattern of an original onto a substrate and exposing the substrate to light with a gap between the substrate and a final surface of the projection optical system being filled with liquid, the apparatus comprising:
- a supply unit having a supply port and configured to supply the liquid to the gap through the supply port, the supply port being arranged to entirely surround the final surface;
- a recovery unit having a recovery port and configured to recover the liquid from the gap through the recovery port;
- an ejection unit having an ejection port and configured to eject a gas through the ejection port outside the liquid filled in the gap;
- and
- a suction unit having a suction port and configured to suck the gas through the suction port outside the liquid filled in the gap,
- wherein the suction port is arranged outside the ejection port.
Dependencies are inferred from the claim text.