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US 7,465,362 B2Granted
Plasma-assisted nitrogen surface-treatment
AssigneeBTU International, Inc.
InventorsDevendra Kumar, Satyendra Kumar
Life of this patent
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Abstract
Methods and systems (10) for plasma-assisted nitrogen surface-treatments are provided. The method can include subjecting a gas (24) to electromagnetic radiation (26) in the presence of a plasma catalyst (100, 120, 140) to initiate a plasma containing nitrogen. The surface region of an object can be exposed to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the surface region.
Claims26
A method of nitriding a first surface region of an object, the method comprising:
- initiating a nitriding plasma by subjecting a gas to electromagnetic radiation having a frequency less than about 333 GHz in the presence of a plasma catalyst, wherein the plasma contains nitrogen;
- exposing the first surface region of the object to the plasma for a period of time sufficient to transfer at least some of the nitrogen from the plasma to the object through the first surface region;
- and
- substantially preventing exposure of a second surface region of the object to the plasma.
1 more element
Dependencies are inferred from the claim text.