Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit

A process for depositing at least one layer on at least one substrate in a process chamber, in which the layer consists of a plurality of components and is insulating, passivating or electrically conductive, the components being vaporized without contact into a temperature-controlled vaporization chamber by means of discontinuous injection of a liquid starting substance or of a starting substance dissolved in a liquid by means of a plurality of injector units, and this vapor in each case being fed to the process chamber by means of a carrier gas, the injection admission pressure in each case being set by means of a pressure regulator, and the mass flow in each case being determined by means of a mass flow meter, characterized in that the time profile of the mass flows through each injector unit are set using a control device, for which purpose the mass flow parameters injection admission pressure, injection frequency and pulse/pause ratio as well as the phase relationship of the pulse/pauses of each injection unit with respect to pulse/pauses of the other injector units are set or varied individually.