Developing process and apparatus
AssigneeChunghwa Picture Tubes, Ltd.
InventorsHsun-Kai Chan, Ta-Yu Liu
Life of this patent
Estimating the term…
Abstract
The invention discloses a developing apparatus and a developing process. Wherein the developing process comprises following steps. First, a developing apparatus and a substrate are provided, wherein the developing apparatus comprises a conveyer and a nozzle. Then, the substrate is conveyed along a first direction by the conveyer, and the nozzle is driven to move along a second direction opposite to the first direction, wherein the nozzle sprays a developer over the substrate as moving. As mentioned above, the non-uniformity of development can be reduced.
Claims11
A developing process, comprising:
- providing a developing apparatus and a substrate, wherein the developing apparatus comprises a conveyer and a nozzle;
- and
- conveying the substrate along a first direction by the conveyer, and driving the nozzle to move along a second direction opposite to the first direction, wherein the nozzle sprays a developer over the substrate as moving, and the nozzle moves at a speed between 2 m/min and 9 m/min.
An developing apparatus, which is suitable for performing a developing process to a substrate, comprising:
- a conveyer, conveying the substrate along a first direction;
- and
- a nozzle, disposed above the conveyer for spraying a developer, wherein as the substrate is conveyed along the first direction, the nozzle is driven to move along a second direction opposite to the first direction and sprays the developer over the substrate, and the nozzle moves at a speed between 2 m/min and 9 m/min.
Dependencies are inferred from the claim text.