Methods of operating a liquid vaporizer
AssigneeMicron Technology, Inc.
InventorsRoss S. Dando, Allen P. Mardian, Raynald B. Cantin, Gurtej S. Sandhu
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Abstract
The present invention is generally directed to a vaporizer with positive liquid shut-off. In one illustrative embodiment, the vaporizer is comprised of a body, a liquid inlet and a carrier gas inlet coupled to the body, a nozzle positioned within the body, the nozzle having at least one opening formed therethrough that defines a vaporized liquid exit, and a positive shut-off valve, a portion of which is adapted to engage the vaporized liquid exit of the nozzle. In another illustrative embodiment, the vaporizer is comprised of a body, a liquid inlet and a carrier gas inlet coupled to the body and a plurality of peltier cells coupled to the body.
Claims21
A method, comprising:
- introducing a liquid to be vaporized into a vaporizer, said vaporizer comprising a nozzle having a vaporized liquid exit and a liquid inlet;
- actuating a seal member that is adapted to sealingly engage said liquid inlet of said nozzle to regulate a flow of said liquid into said nozzle;
- and
- actuating a positive shut-off valve that is adapted to sealingly engage said vaporized liquid exit of said nozzle.
A method, comprising:
- introducing a liquid to be vaporized into a vaporizer, said vaporizer comprising:
- a nozzle having a vaporized liquid exit and a liquid inlet;
- a seal member that is adapted to sealingly engage said liquid inlet of said nozzle;
- and
- an actuator arm that is operatively coupled to said seal member;
- actuating said actuator arm to move said seal member relative to said liquid inlet of said nozzle;
- and
- actuating a positive shut-off valve that is adapted to sealingly engage said vaporized liquid exit of said nozzle.
A method of operating a vaporizer comprising a body, a first cavity and a second cavity formed in said body, and a nozzle having a liquid inlet and a vaporized liquid exit, said liquid inlet of said nozzle being positioned within said first cavity and said vaporized liquid exit of said nozzle being positioned within said second cavity, wherein the method comprises:
- introducing a liquid to be vaporized by said vaporizer into said first cavity;
- actuating a seal member that is adapted to sealingly engage said liquid inlet of said nozzle to regulate a flow of liquid in said first cavity into said nozzle;
- and
- actuating a positive shut-off valve that is adapted to sealingly engage said vaporized liquid exit of said nozzle to regulate a flow of liquid from said vaporized liquid exit of said nozzle into said second cavity.
Dependencies are inferred from the claim text.