Method and system of coating polymer solution on surface of a substrate

A method of coating a surface of a substrate with a polymer solution, comprising:

• providing the substrate;
• dispensing the polymer solution onto the surface of the substrate using a coating system having a pump connected in-line with a buffer tank and a polymer solution source, the pump to draw the polymer solution from the polymer solution source and the buffer tank in a continuous fluid path to dispense the polymer solution, the polymer solution source being connected to a pressure source capable of causing the polymer solution to be transferred from the polymer solution source into the buffer tank, the buffer tank to maintain a constant level of polymer solution predetermined to be sufficient to prevent air from being drawn into a dispensing solution;
• and
• wherein an enable valve is placed between the buffer tank and the pump wherein opening the enable valve allows the polymer solution to flow to the pump, wherein a fluid sensor is coupled to the polymer solution source, the fluid sensor configured to detect the polymer solution level in the polymer solution source, and wherein the sensor is capable of shutting off the enable valve when the polymer solution level in the polymer solution source is detected to be substantially low or empty;
• and
• wherein a fluid sensor and a release valve are placed in communication with the buffer tank for bubble release when bubbles are detected.

A method of coating a surface of a substrate with a polymer solution, comprising:

• providing the substrate;
• and
• dispensing the polymer solution onto the surface of the substrate using a coating system having a pump connected in-line with a buffer tank and a polymer solution source, the pump to draw the polymer solution from the polymer solution source and the buffer tank in a continuous fluid path to dispense the polymer solution, the polymer solution source being connected to a pressure source capable of causing the polymer solution to be transferred from the polymer solution source into the buffer tank, the buffer tank to maintain a constant level of polymer solution predetermined to be sufficient to prevent air from being drawn into a dispending solution,
• wherein an enable valve is placed between the buffer tank and the pump wherein opening the enable valve allows the polymer solution to flow to the pump, wherein a fluid sensor is coupled to the polymer solution source, the fluid sensor configured to detect the polymer solution level in the polymer solution source, and wherein the sensor is capable of shutting off the enable valve when the polymer solution level in the polymer solution source is detected to be substantially low or empty
• wherein the pump is connected in-line with at least a second buffer tank and a second polymer solution source, wherein a second enable valve is placed between the second buffer tank and the pump wherein opening of the second enable valve allows the polymer solution to flow to the pump, wherein a second fluid sensor is coupled to the second polymer solution source, the second fluid sensor configured to detect the polymer solution level in the second polymer solution source, and wherein the second sensor is capable of shutting off the second enable valve when the polymer solution level in the second polymer solution source is detected to be substantially low or empty.

A method of coating a surface of a substrate with a polymer solution, comprising:

• securing a substrate on a rotable substrate station;
• dispensing the polymer solution onto the surface of the substrate using a pump, wherein dispensing the polymer solution further comprises,
• drawing a polymer solution using a coating system having a pump being connected in-line with a buffer tank and a polymer solution source, the pump drawing the polymer solution from the polymer solution source and the buffer tank in a continuous fluid path to dispense the polymer solution on the surface of the substrate, and
• maintaining a constant level of polymer solution in the buffer tank;
• and
• spinning the substrate to coat the dispensed polymer solution over the surface;
• and
• wherein a fluid sensor and a release valve are placed in communication with the buffer tank for bubble release when bubbles are detected.

A method of coating a surface of a substrate with a polymer solution comprising:

• securing a substrate on a rotable substrate station;
• dispensing the polymer solution onto the surface of the substrate using a pump, wherein dispensing the polymer solution further comprises,
• drawing a polymer solution using a coating system having a pump being connected in-line with a buffer tank and a polymer solution source, the pump drawing the polymer solution from the polymer solution source and the buffer tank in a continuous fluid path to dispense the polymer solution on the surface of the substrate, and
• maintaining a constant level of polymer solution in the buffer tank;
• and
• spinning the substrate to coat the dispensed polymer solution over the surface;
• and
• connecting a first buffer tank and a first polymer solution source in-line with the pump wherein the first buffer tank is connected between the first polymer solution source and the pump;
• connecting a second buffer tank and a second polymer solution source in-line with the pump wherein the second buffer tank is connected between the second polymer solution source and the pump;
• providing a sensor to sense the polymer solution level for each of the first polymer solution source and the second polymer solution source;
• providing an enable valve being communicative with the sensor and the pump, the enable valve being able to direct the pump away from an empty polymer solution source.