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US 7,071,552 B2Granted
IC die with directly bonded liquid cooling device
AssigneeIntel Corporation
InventorsKramadhati V. Ravi, Ravi S. Prasher, Gregory M. Chrysler
Life of this patent
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Abstract
An apparatus includes an integrated circuit (IC) die having a substrate formed of a first semiconductor material and a cooling device form of a second semiconductor material. The cooling device is directly mounted to the substrate of the IC die.
Claims16
An apparatus, comprising:
- an integrated circuit (IC) die including a die surface formed with a first semiconductor material;
- a cooling device formed with a second semiconductor material;
- and
- the cooling device including a cooling plate having a first and a second cooling plate side and a plurality of interconnected channels being formed in the first cooling plate side, with the first cooling plate side being directly bonded to the die surface by a semiconductor material-to-semiconductor material bond to enclose the plurality of interconnected channels to form a plurality of liquid-conducting passages.
1 more element
A system, comprising:
- an electronic assembly including an integrated circuit (IC) die having a die surface formed with a first semiconductor material;
- the electronic assembly further including a cooling device formed with a second semiconductor material and having a cooling plate with a first and a second cooling plate side and a plurality of interconnected channels being formed in the first cooling plate side, with the first cooling plate side being directly bonded to the die surface by a semiconductor material-to-semiconductor material bond to enclose the plurality of interconnected channels to form a plurality of liquid-conducting passages;
- an IC package having the electronic assembly mounted therein;
- a printed circuit board (PCB) having the IC package mounted thereon;
- a dynamic random access memory mounted on the PCB and electrically coupled to the electronic assembly;
- and
- an input/output interface mounted on the PCB and electrically coupled to the electronic assembly.
4 more elements
An apparatus, comprising:
- an integrated circuit (IC) die including a die surface formed with a first semiconductor material;
- a cooling device formed with a second semiconductor material;
- the cooling device including a cooling plate having a first and a second cooling plate side with a plurality of interconnected channels being formed in the first cooling plate side;
- a cover plate mounted to the first cooling plate side to enclose the plurality of interconnected channels to form a plurality of liquid-conducting passages;
- the second cooling plate side of the cooling plate being directly bonded to the die surface by a first semiconductor material-to-semiconductor material bond;
- and
- the cover plate and the cooling plate each including a width and a length dimension substantially equal to a width and a length dimension of the die surface.
4 more elements
Dependencies are inferred from the claim text.