Bump with basic metallization and method for manufacturing the basic metallization
AssigneePac Tech—Packaging Technologies GmbH
InventorElke Zakel
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AssigneePac Tech—Packaging Technologies GmbH
InventorElke Zakel
Estimating the term…
A method for manufacturing a bump on a terminal face (Z1) of a semiconductor substrate (20), in which the terminal face is nucleated to generate a basic metallization through electrolytic coating of the terminal face with zincate, in such a way that zinc particles (24) electrolytically deposited on the terminal face serve as nuclei for an ensuing contact metallization (28) autocatalytically deposited on the basic metallization. In addition to the electrolytic coating with zincate, an electrolytic coating of the terminal face with palladium takes place, in such a way that, in addition to zinc particles (24), palladium particles (25) deposited on the terminal face serve as nuclei for the contact metallization subsequently autocatalytically deposited on the terminal face.
A method for manufacturing a bump on a terminal face of a semiconductor substrate, the method comprising:
The method according to clam 1, wherein the electrolytic coating of the terminal face with zincate to form a zincate coating and electrolytic coating of the terminal face with palladium to form a palladium coating take place in a single method step, in such a way that the zincate coating occurs simultaneously with the palladium coating via a mixed electrolyte zincate and palladium coating.
A bump with a basic metallization situated on a terminal face of a semiconductor substrate and a contact metallization situated on the basic metallization, wherein the basic metallization has zinc and palladium as constituents each serving as nuclei for ensuring adhesion between the contact metallization autocatalytically deposited on the basic metallization nd the terminal face and at least one constituent of the basic metallization is formed as numerous mutually independent areas.
A method for manufacturing a bump on a terminal face of a semiconductor substrate, the method comprising:
Dependencies are inferred from the claim text.