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US 6,720,026 B2Granted
Method for improving the optical separation of fluorescent layers
AssigneeSiemens Aktiengesellschaft
InventorsManfred Fuchs, Erich Hell, Detlef Mattern, Bernhard Schmitt
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Abstract
In a method for improving the optical separation of needle-shaped fluorescent layers, made from a fluorescent material, which are formed by vapor deposition on a substrate, vapor deposition is controlled so that the fluorescent layer is deposited on the substrate with a density which is reduced in comparison to the density that the fluorescent material has as a solid.
Claims13
A method for forming fluorescent layers on a substrate, comprising the steps of:
- vapor depositing a needle-shaped fluorescent layer having needle structures with voids therebetween, composed of fluorescent material, by producing a vapor jet of said fluorescent material onto a substrate in a vapor-deposition apparatus;
- cooling said vapor jet before said vapor jet strikes said substrate by flowing cool inert gas through said vapor-deposition apparatus during the vapor depositing;
- and
- controlling vapor deposition of said fluorescent layer so that said fluorescent layer is deposited on said substrate with lattice imperfections therein, giving said fluorescent it layer a density which is reduced, due to said voids and lattice imperfections, in comparison to a density which said fluorescent material has as a solid, to produce a needle-shaped fluorescent layer with optical separation between needle structures.
1 more element
Dependencies are inferred from the claim text.