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US 6,719,851 B1Granted
Lid assembly for opening a process chamber lid and uses therefor
AssigneeApplied Materials, Inc.
InventorsShinichi Kurita, Wendell T. Blonigan
Life of this patent
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Abstract
Provided herein is a lid assembly for chemical vapor deposition (CVD) process chamber, comprising a moveable lid, two linear guide rollers connected to the lid, one or more linear lifting actuators, and a rotation actuator connected to the axis of the lid. This lid assembly may be used for opening/closing process chamber as well as wet-cleaning process chamber in chemical vapor deposition.
Claims6
A lid assembly for a process chamber, comprising:
- a moveable lid;
- a first linear guide roller and a second linear guide roller, wherein said first linear guide roller is parallel to said second linear guide roller, and wherein both linear guide rollers are connected to said lid, one linear guide roller on each end of a lateral side of the lid, wherein said lateral side is the axis around which the moveable lid rotates;
- one or more linear lifting actuators to move the lid up and down along said linear guide rollers;
- and
- a rotation actuator connected to said lateral side of the lid to rotate the lid.
2 more elements
Dependencies are inferred from the claim text.