Method for transferring epitaxy layer
AssigneeNational Chiao Tung University
InventorsYewChung Sermon Wu, PeiYan Lin
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Abstract
A method for transferring an epitaxy layer is provided. The method includes steps of (a) providing a first substrate, (b) forming a first epitaxy layer on the first substrate, (c) forming a masking layer having at least a pattern on the first epitaxy layer, (d) forming a second epitaxy layer on the masking layer, (e) bonding a second substrate to the second epitaxy layer, and (f) removing the masking layer and separating the second epitaxy layer from the first epitaxy layer, thereby the second epitaxy layer being transferred to the second substrate.
Claims27
A method for transferring an epitaxy layer comprising steps of:
- (a) providing a first substrate;
- (b) forming a first epitaxy layer on said first substrate, wherein said first epitaxy layer comprises a low-temperature buffer layer (LT-Buffer Layer) and a high-temperature epitaxy layer;
- (c) forming a masking layer having at least a pattern on said first epitaxy layer;
- (d) forming a second epitaxy layer on said masking layer;
- (e) bonding a second substrate to said second epitaxy layer;
- and
- (f) removing said masking layer and separating said second epitaxy layer from said first epitaxy layer, thereby said second epitaxy layer being transferred to said second substrate.
A method for transferring an epitaxy layer comprising steps of:
- (a) providing a first substrate;
- (b) forming a first epitaxy layer on said first substrate, wherein said first epitaxy layer comprises a low-temperature buffer layer (LT-Buffer Layer) and a high-temperature epitaxy layer;
- (c) forming a masking layer on said first epitaxy layer and then etching said masking layer to form at least a pattern;
- (d) forming a second epitaxy layer on said masking layer;
- (e) removing said masking layer;
- and
- (f) bonding a second substrate to said second epitaxy layer and separating said second epitaxy layer from said first epitaxy layer so as to obtain said second substrate with said second epitaxy layer.
Dependencies are inferred from the claim text.