Semiconductor device with self-aligned contact structure

A semiconductor device, comprising:

• a silicon substrate having, on an upper surface of source/drain regions, a first refractory metal silicide film formed by a reaction with a refractory metal film deposited on a main surface;
• a gate electrode, having side surfaces and an upper surface, formed on said silicon substrate in a region between said source/drain regions and having, a silicon containing film and a second refractory metal silicide film formed by a reaction of the silicon containing film and a refractory metal film deposited on the silicon containing film;
• a first insulating film formed to cover the upper surface one of the side surfaces of said gate electrode;
• a second insulating film formed to cover the upper surfaces of said first insulating film and said first refractory metal silicide film and having an etching speed higher than said first insulating film in a prescribed etching condition;
• a first contact hole formed to reach a surface of one of said source/drain regions, a surface of the first insulating film being located on one of the side surfaces of the gate electrode and a surface of the first insulating film being located on the upper surface of the gate electrode through said second insulating film;
• and
• a shared contact hole formed through said first and second insulating films and reaching both of said gate electrode and the other one of said source/drain regions.