Heat treating device and heat treating method

A heat treatment method comprising the steps of:

• holding objects to be processed in a multistage manner by a holding tool,
• transferring said holding tool holding the objects to be processed into a reaction vessel having a lower open end from underneath,
• heating an inside of said reaction vessel by a heater installed outside said reaction vessel, and
• feeding film forming gas to said reaction vessel to perform a film forming process to objects to be processed,
• wherein at said step of feeding film forming gas, a temperature on an under side of said holding tool is higher than that in an atmosphere where said objects to be processed are placed.

A heat treatment apparatus for heating objects to be processed, said apparatus comprising:

• a heating oven being controllable to attain a first temperature and having a lower open end;
• a cover for closing the lower open end of the heating oven;
• a holding tool located above the cover for holding the objects to be processed;
• and
• a heating unit provided between the cover and the holding tool, wherein the heating unit is controllable to attain a second temperature greater than the first temperature.