Method of making an electrically programmable memory cell
AssigneeSTMicroelectronics S.r.l.
InventorsJoseph Borel, Jean-Pierre Schoellkopf, Constantin Papadas
Life of this patent
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Abstract
The present invention relates to a method of manufacturing an electrically programmable memory cell with a lateral floating gate with respect to the control gate, including the steps of forming an insulated control gate on an active area; forming a thin insulating layer around the control gate; successively depositing a thin layer of a conductive material and a layer of an insulating material; anisotropically etching the insulating material to form spacers of this material; and removing the portions of the thin conductive layer which are not coated with the spacers.
Claims10
A method of manufacturing an electrically programmable memory cell, including steps of:
- forming an insulated control gate on an active area of a semiconductor substrate;
- forming a thin insulating layer around the control gate;
- successively depositing a thin layer of a conductive material and a layer of an insulating material on the thin insulating layer;
- anisotropically etching the insulating material to form insulating spacers of the insulating material;
- and
- removing portions of the thin layer of the conductive material which are not coated with the insulating spacers to form a floating gate that is laterally arranged with respect to the control gate.
The method of claim l, wherein the conductive material has a thickness from 5 to 20 nm.
A method of manufacturing an electrically programmable memory cell, including steps of:
- forming an insulated control gate on an active area of a semiconductor substrate;
- forming a thin insulating layer around the control gate;
- successively depositing a thin layer of a conductive material and a layer of an insulating material on the thin insulating layer;
- anisotropically etching the insulating material to form insulating spacers of the insulating material;
- and
- removing portions of the thin layer of the conductive material which are not coated with the insulating spacers to form a floating gate that is laterally arranged with respect to the control gate and disposed between the control gate and the insulating spacers.
Dependencies are inferred from the claim text.