Micro fusible link for semiconductor devices and method of manufacture
AssigneeInternational Business Machines Corporation
InventorsPatricia E. Marmillion, Anthony M. Palagonia, Dennis A. Schmidt
Life of this patent
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Abstract
An electrically activated fuse with a high melting point heater element in series with a low melting point fusible link. The heater element has a higher resistivity and larger cross-sectional area than the fusible link in order to withstand heat that the heater element generates bringing the fusible link to its melting point. Fuse dimensions (width and length) are each between 0.1 and 2.0 microns, with a thermal mass of the heater element being sufficient to melt the fusible link.
Claims14
A method of forming fusible links comprising the steps of:
- a) forming a pair of metal contacts in a surface layer of dielectric material;
- and
- b) forming a fusible element between and electrically connected to said metal contacts by
- forming trenches between said metal contacts and
- filling respective trenches with fusible material and resistive material to connect said metal contacts, said resistive material forming a heater.
A method of forming fusible links comprising the steps of:
- a) forming a pair of metal contacts in a surface layer of dielectric material;
- and
- b) forming a fusible element between and electrically connected to said metal contacts by
- 1.) forming a strip of resistive material on said surface adjacent, between and in contact with said metal contacts;
- 2.) etching a gap in said strip;
- and
- 3.) forming a strip of fusible material spanning said gap.
A method of forming fusible links comprising the steps of:
- a) forming resistive elements at a pair of contacts;
- and
- b) forming a fusible element between said resistive elements, said fusible element having a melting point below that of said resistive elements such that a current between said metal contacts passing through a first of said resistive elements, through said fusible element and through a second of said resistive elements raises the temperature of said fusible element to said melting point of said fusible element.
Dependencies are inferred from the claim text.