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US 6,284,650 B1Granted
Integrated tungsten-silicide processes
AssigneeApplied Materials, Inc.
InventorsCory M. Czarnik, Vedapuram S. Achutharaman, Mahalingam Venkatesan, Klaus-Dieter Rinnen
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Abstract
A method of forming a silicide on a silicon layer. First, a monosilane based tungsten-silicide layer is formed on the silicon layer. Next, a dichlorosilane based tungsten-silicide layer is formed on the monosilane based tungsten-silicide layer.
Claims17
A method of forming a silicide on a silicon layer comprising the steps of:
- forming a first tungsten-silicide layer on said silicon layer wherein said first tungsten-silicide layer consists of monosilane (SiH4) based tungsten-silicide;
- forming a second tungsten-silicide layer on said first tungsten-silicide layer wherein said second tungsten-silicide layer is formed from a gas mix comprising dichlorosilane (DCS);
- and
- wherein said first tungsten-silicide layer prevents DCS based tungsten-silicide from interacting with said silicon layer.
1 more element
A method of forming a silicide on a doped polysilicon layer comprising the steps of:
- forming a first tungsten-silicide layer on said doped polysilicon surface, said first tungsten-silicon layer consisting essentially of tungsten silicide formed from a reduction reaction of SiH4 and WF6;
- and
- forming a second tungsten-silicide layer on said first tungsten-silicide layer wherein said second tungsten-silicide layer is formed from a reduction reaction of DCS and WF6 and
- wherein said first tungsten-silicide layer prevents DCS based tungsten-silicide from interacting with said doped polysilicon layer.
1 more element
A method of forming a silicide layer on a doped polysilicon layer, said method comprising the steps of:
- forming an interfacial tungsten-silicide layer on said doped polysilicon layer;
- and
- forming a DCS based tungsten-silicide layer on said interfacial tungsten-silicide layer wherein said interfacial tungsten-silicide layer prevents DCS based tungsten-silicide from interacting with said doped polysilicon layer.
Dependencies are inferred from the claim text.