Center node for deep trench capacitors
AssigneeInfineon Technologies AG
InventorsUlrich Zimmermann, Thomas Achammer
Life of this patent
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Abstract
A trench capacitor cell, in accordance with the present invention, includes a trench having an outer electrode formed in a substrate adjacent to the trench. A storage node is formed in the trench and capacitively coupled to the outer electrode. A center node is capacitively coupled to the storage node, and the storage node surrounds the center node within the trench. The center node includes a portion extending from the trench for connecting to a potential to provide charge retention in the storage node during operation.
Claims20
A trench capacitor cell comprising:
- a trench having an outer electrode formed in a substrate adjacent to the trench;
- a storage node formed in the trench and capacitively coupled to the outer electrode;
- a transfer transistor coupled to the storage node for charging and discharging the trench capacitor;
- a center node capacitively coupled to the storage node, the storage node surrounding the center node within the trench, the center node including a portion extending from the trench for connecting to a potential to provide charge retention in the storage node during operation.
A trench capacitor cell comprising:
- a trench having an outer electrode formed in a substrate adjacent to the trench;
- a storage node formed in the trench and capacitively coupled to the outer electrode, the storage node being connected to a transfer transistor which enables the storage node to be charged and discharged;
- and
- a center node capacitively coupled to the storage node, the storage node surrounding the center node within the trench, the center node including a portion connecting to a gate of the transfer transistor to provide charge retention in the storage node during operation.
A trench capacitor cell comprising:
- a trench having an outer electrode formed in a substrate adjacent to the trench;
- a storage node formed in the trench and capacitively coupled to the outer electrode, the storage node being connected to a transfer transistor which enables the storage node to be charged and discharged;
- and
- a center node capacitively coupled to the storage node, the storage node surrounding the center node within the trench, the center node including a portion connecting to a passing wordline to provide charge retention in the storage node during operation.
A trench capacitor cell comprising:
- a trench having an outer electrode formed in a substrate adjacent to the trench;
- a storage node formed in the trench and capacitively coupled to the outer electrode;
- a center node capacitively coupled to the storage node, the storage node surrounding the center node within the trench, the center node including a portion extending from the trench for connecting to a potential to provide charge retention in the storage node during operation, wherein the potential is a constant potential.
Dependencies are inferred from the claim text.