US 6,224,675 B1 · Multiple head dispensing system and method

Abstract

Embodiments of the present invention provide a multiple head dispensing system having independently controlled dispensing heads. Each of the dispensing heads may be independently controlled to provide simultaneous, asynchronous operation and to allow dispensing of different materials onto substrates. Independent control of the dispensing heads is accomplished under the control of a controller in conjunction with a plurality of gantry systems, each of which positions one of the multiple dispensing heads over a substrate that is to receive dispensing material. In some embodiments, each gantry system utilizes two drive mechanisms, arranged in parallel, that provide movement of the dispensing head over an x-y plane. Multiple conveyor systems are utilized that allow parallel processing of work products in the dispensing system.

Claims38

Dependent claims

A system for performing operations on substrates, the system comprising:

a chassis that supports components of the system;
a plurality of work heads coupled to the chassis, each of the working heads being capable of performing an operation on a substrate;
and
a control system coupled to the plurality of work heads, the control system including:
a user interface for allowing a user of the system to monitor and control operation of the plurality of work heads through a user interface device;
a chassis management system coupled to the user interface that controls the plurality of work heads to perform the operations on the substrate, the chassis management system being configured to establish a separate instance of a work head manager for each of the work heads to allow the work heads to simultaneously to operate in an asynchronous manner.

3 more elements

A method for performing operations on substrates using a plurality of work heads contained in a system having a system controller, the method comprising the steps of:

loading a first substrate into the system;
loading a first recipe into the system controller, the first recipe defining a first operation to be performed on the first substrate by a first work head of the plurality of work heads;
loading a second recipe into the system controller, the second recipe defining a second operation be performed on the first substrate by a second work head of the plurality of work heads;
performing the first operation on the first substrate using the first work head;
and
performing the second operation on the first substrate using the second work head.

3 more elements

A method for performing operations on substrates using a plurality of work heads contained in a system having a system controller, the method comprising the steps of:

loading a first substrate into the system;
establishing a first instance of a work head manager in the system controller to control a first operation to be performed on the first substrate by a first work head of the plurality of work heads;
establishing a second instance of a work head manager in the system controller to control a first operation to be performed on the first substrate by a second work head of the plurality of work heads;
performing the first operation on the first substrate using the first work head;
and
performing the second operation on the first substrate using the second work head.

3 more elements

Dependencies are inferred from the claim text.

Multiple head dispensing system and method

Life of this patent

Multiple head dispensing system and method

Life of this patent

Abstract

Claims38