Device fabricated by a method of controlling outdiffusion from a doped three-dimensional film

A stacked capacitor formed on a supporting substrate having wordlines and an active region therebetween, comprising:

• a lower cell plate extending from the top of one wordline to the top of another wordline and overlying the active region therebetween, said lower cell plate comprised of a first layer of lightly doped film and a second layer of heavily doped film on top of said first layer of film, said second layer having a dopant density which decreases from said portions overlying the tops of the wordlines to the portion overlaying the active region;
• a layer of dielectric material positioned on top of said layers of film;
• and
• a layer of cell plate material positioned on top of said layer of dielectric material.

A combination, comprising:

• a substrate having a plurality of active regions formed therein;
• a plurality of gate oxide regions positioned between certain of said active regions and a plurality of field oxide regions separating certain said active regions;
• a plurality of wordline structures running in parallel rows such that when a first wordline structure overlies a gate oxide region, a second adjacent wordline structure overlies a field oxide region, and an active region is positioned therebetween;
• a plurality of lower cell plates each extending from the top of said first wordline structure, over one of said active regions to the top of said second wordline structure, each of said lower cell plates being comprised of a first layer of lightly doped film and a second layer of heavily doped film on top of said first layer of film, said second layer having a dopant density which decreases from said portions overlying the tops of the wordlines to the portion overlaying the active region;
• a layer of dielectric material patterned such that a portion of said layer is positioned on top of one of each of said lower cell plates;
• and
• a plurality of upper cell plates each positioned on top of one of said portions of dielectric material.