US 6,204,075 B1 · Method of detecting defects in a wiring process

Abstract

A circuit, a semiconductor wafer including the circuit and a method for detecting defects of wiring used for detecting a malfunction in a wiring fabrication process during semiconductor device manufacturing. The circuit comprises an insulating film formed on a semiconductor substrate, a first wiring which is formed on the insulating film formed on the semiconductor substrate and is in an electrically floating condition, and a second wiring which is formed on the insulating film formed on the semiconductor substrate and is disposed adjacent to the first wiring and is in an electrically floating condition, wherein the capacitance between the second wiring and the semiconductor substrate is larger than the capacitance between the first wiring and the semiconductor substrate. Portions of the first and second wiring are scanned by an electron beam on the surfaces thereof, and secondary electrons emitted from the first wiring and second wiring are detected.

Claims11

Dependent claims

A method for detecting defects of wiring to detect a malfunction of a fabrication process of a wiring in a semiconductor device manufacturing method, the method comprising:

forming a plurality of circuits for detecting defects of wiring on an insulating film formed on a semiconductor substrate, in a manufacturing line to be tested, said circuit comprising a first wire which is in an electrically floating condition, and a second wire which is in an electrically floating condition and which is disposed adjacent said first wire, wherein the capacitance between said second wire and said semiconductor substrate is larger than the capacitance between said first wire and said semiconductor substrate;
scanning an electron beam on the surfaces of said first wire and said second wire;
and
detecting secondary electrons emitted from said first wire and said second wire.

1 more element

Dependencies are inferred from the claim text.

Method of detecting defects in a wiring process

Life of this patent

Method of detecting defects in a wiring process

Life of this patent

Abstract

Claims11