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US 6,150,916 AGranted
Architecture of poly fuses
AssigneeUnited Microelectronics Corp.
InventorsJy-Hwang Lin, Tsan-Wen Liu
Life of this patent
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Abstract
An architecture of poly fuses includes a number of fuses, a dielectric layer, a sheet-like etching stop layer, and a passivation layer, wherein the sheet-like etching stop layer further includes a number of slices, and wherein each of the slices corresponds to one of the fuses underneath. The architecture of poly fuses according to the invention reduces the energy dispersion during the defective recovering process, and improves the recovery rate for defective memory cells.
Claims5
An architecture of poly fuses, the architecture comprising:
- a plurality of fuses, which are formed on a semiconductor substrate;
- a unitary dielectric layer, which is formed on the semiconductor to abut the fuses and the semiconductor substrate;
- a sheet-like etching stop layer comprising silicon nitride, which is formed abutting on the unitary dielectric layer, wherein the sheet-like etching stop layer comprises a plurality of slices, and wherein each of the slices corresponds to one of the fuses underneath;
- and
- a passivation layer, which covers the sheet-like etching stop layer and the unitary dielectric layer.
2 more elements
Dependencies are inferred from the claim text.