Methods of forming SOI insulator layers, methods of forming transistor devices, and semiconductor devices and assemblies
AssigneeMicron Technology, Inc.
InventorH. Montgomery Manning
Life of this patent
Estimating the term…
Loading patent…
AssigneeMicron Technology, Inc.
InventorH. Montgomery Manning
Estimating the term…
The invention encompasses methods of forming individual silicon-on-insulator layers having varying thicknesses within the individual layers. The invention also encompasses methods of forming transistor devices from silicon-on-insulator layers. Additionally, the invention encompasses semiconductor devices and assemblies utilizing silicon-on-insulator layers. The invention includes a method comprising: a) providing a substrate; b) providing an insulator layer over the substrate; c) providing a semiconductive layer over the insulator layer, the semiconductive layer having a first portion and a second portion; d) forming a depletion region within the semiconductive layer and proximate the insulator layer, the depletion region having a different thickness in the first portion than in the second portion; and f) etching the semiconductive layer to about the depletion region. The invention also includes a method comprising: a) providing a semiconductive substrate; b) forming a conductivity-modifying diffusion region in only a portion of the substrate; c) forming an insulator layer over the semiconductive substrate; d) forming a semiconductive layer over the insulator layer; e) forming a depletion region within the semiconductive layer, the depletion region being proximate the insulator layer and having a different thickness over the conductivity-modifying diffusion region than over other portions of the substrate; and f) etching the semiconductive layer to about the depletion region.
A semiconductor processing method of forming a thin film transistor comprising:
A semiconductor processing method of forming a thin film transistor comprising:
A semiconductor processing method of forming p-channel and n-channel devices comprising:
A semiconductor processing method of forming peripheral transistor devices and memory array transistor devices comprising:
Dependencies are inferred from the claim text.