Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly
AssigneeCymer, Inc.
InventorR. Kyle Webb
Life of this patent
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AssigneeCymer, Inc.
InventorR. Kyle Webb
Estimating the term…
The present invention provides an electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active radial magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and the rotors of at least two radial bearings are sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment. No thrust bearing is provided. Axial positioning of the shaft is provided by reluctance centering produced by the at least two radial magnetic bearings and the brushless DC motor. In a preferred embodiment the motor stator is larger in the axial direction than the rotor to increase the magnetic centering effect.
An electric discharge gas laser comprising:
Dependencies are inferred from the claim text.