Process design for wafer edge in vlsi
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsZin-Chein Wei, Yuh-Jier Mii
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Abstract
A wafer structure and method of forming a wafer structure with all of the dielectric material and conducting material films removed from the outer periphery of the wafer in order to protect the dielectric and conducting films from damage due to wafer handling, storage, or clamping. The dielectric or conducting material is removed from the wafer edge using wafer edge exposure or edge bead rinse methods. The wafer edge exposure method is carried out at the same time the dielectric or conducting layer is being patterned.
Claims11
A method of manufacturing integrated circuit wafers, comprising the steps of:
- providing a semiconductor wafer having an outer periphery;
- forming a layer of first dielectric material on said semiconductor wafer;
- removing that part of said first dielectric material within a first distance of said outer periphery of said semiconductor wafer;
- forming a layer of first conductor material on said layer of first dielectric material;
- patterning said layer of first conductor material, thereby removing that part of said layer of first conductor material within a second distance of said outer periphery of said semiconductor wafer;
- forming a layer of second dielectric material on said semiconductor wafer thereby covering said patterned layer of first conductor material;
- patterning said layer of second dielectric material, thereby forming contact holes in said layer of second dielectric material and removing that part of said layer of second dielectric material within a third distance of said outer periphery of said semiconductor wafer;
- forming a patterned layer of second conductor material on said layer of second dielectric material thereby filling said contact holes formed in said layer of second dielectric material;
- forming a layer of third dielectric material on said layer of second dielectric material thereby covering said patterned layer of second conductor material;
- and
- removing that part of said layer of third dielectric material within a fourth distance of said outer periphery of said semiconductor wafer.
Dependencies are inferred from the claim text.