Method and tool for handling micro-mechanical structures

A method of making a micro-device comprising:

• forming a plurality of micro-devices on a wafer;
• forming a plurality of links that interconnect said plurality of micro-devices for maintaining a unitary array structure;
• releasing said plurality of micro-devices and said plurality of links from said wafer;
• separating said plurality of micro-devices into individual micro-devices;
• and
• forming a matrix of magnetic strips that are networked to impart added overall tensile strength to the array;
• connecting said matrix of magnetic strips to said plurality of links;
• and
• releasing said plurality of micro-devices and said plurality of links.

A method of making a micro-device comprising:

• forming a plurality of micro-devices on a wafer:
• forming a plurality of links that interconnect said plurality of micro-devices for maintaining a unitary array structure;
• releasing said plurality of micro-devices and said plurality of links from said wafer;
• separating said plurality of micro-devices into individual micro-devices;
• and
• using a magnetic pick-up tool to lift the entire array for further processing.