Apparatus for uniformly heating a substrate
AssigneeBTG International Limited
InventorAlan Richard Baxendine
Life of this patent
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Abstract
Support 7 is uniformly heated from underneath by an annular heater 8 having a vertically adjustable cooling disc 20 in the middle. This arrangement gives a very uniform temperature profile diametrically across the top of the support 7, useful in the production of semiconductor components 10 which are consistently heat treated wherever they are placed on the support 7. Support 7 is rotated and may be subjected to microwave irradiation from an overhead generator 3.
Claims16
An apparatus for uniformly heating a substrate in a controlled atmosphere, comprising a circular support for the substrate and, underneath or above the support and concentric with and parallel thereto, an annular radiant heater, and cooling means for cooling a central portion of said support disposed within the central circle of the annulus.
Dependencies are inferred from the claim text.