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US 5,854,468 AGranted
Substrate heating apparatus with cantilevered lifting arm
AssigneeBrooks Automation, Inc.
InventorRichard S. Muka
Life of this patent
Estimating the term…
Abstract
An apparatus for heating substrates having a frame forming a vacuum chamber, a heater, a lift mechanism and a lift arm. The lift arm has a general "Y" shape and is located in a groove in a top heat transfer surface of the heater. The lift arm extends out of the groove at a lateral side of the heater and is connected to the lift mechanism.
Claims22
A substrate heating apparatus comprising:
- a frame forming a chamber;
- a heater having a heating surface located in the chamber, the heating surface having grooves along the heating surface;
- a lift arm located in at least one of the grooves and extending out of the at least one groove at a lateral side of the heater;
- and
- a lift mechanism connected to the frame and the lift arm for moving the lift arm in and out of the at least one groove past a top of the heating surface.
2 more elements
A substrate heating apparatus comprising:
- means for passive gas heat conduction including a heating plate with a heat transfer surface having gas conduit grooves therealong and standoffs extending from the heat transfer surface for holding a substrate at a spaced distance from the heat transfer surface;
- and
- means for moving a substrate onto and off of the standoffs comprising a lifting arm that has a lower position inside a first one of the grooves and that extends out of the first groove from a lateral side of the heating plate to a movement mechanism.
A substrate heating apparatus comprising:
- a frame forming a chamber;
- a heater having a heating surface located in the chamber, the heating surface having grooves along the heating surface;
- a lift arm located in at least one of the grooves and extending out of the at least one groove at a lateral side of the heater;
- a lift mechanism connected to the frame and the lift arm for moving the lift arm in and out of the at least one groove past a top of the heating surface;
- and
- wherein the lift arm extends along at least half the width of the heating surface.
3 more elements
Dependencies are inferred from the claim text.