US 5,707,687 A · Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus

Abstract

A suction chuck and an inner cup are rotated in unison with each other to spread a coating solution uniformly over a planar object in the inner cup under centrifugal forces. Vent holes defined in an outer cup lid which closes an outer cup are held out of communication with vent holes defined in a ring-shaped closure member, so that the interior space in the outer cup is kept out of communication with the exterior space around the outer cup. The concentration of a solvent in the outer cup remains so high that no mist is produced in the outer cup. After the planar object has been coated and before the outer cup lid is opened, the ring-shaped closure member is turned to align the vent holes in the outer cup lid with the vent holes in the ring-shaped closure member, breaking any vacuum in the outer cup with ambient air introduced through the vent holes into the outer cup. Thereafter, the outer and inner cup lids are opened, and the coated planar object is taken out.

Claims17

Dependent claims

A rotary-cup coating apparatus for coating an object, comprising:

an outer cup;
an inner cup rotatably disposed in said outer cup, for placing an object to be coated therein;
an outer cup lid for closing said outer cup, said outer cup lid having at least one vent hole defined therein and providing communication between an interior space in said outer cup surrounding said inner cup and an exterior space around said outer cup;
an inner cup lid for closing said inner cup;
and
a closure member movably mounted on said outer cup lid for selectively opening and closing said vent hole.

3 more elements

A method of coating an object with a rotary-cup coating apparatus having an outer cup, an inner cup rotatably disposed in said outer cup, for placing the object to be coated therein, an outer cup lid for closing said outer cup, said outer cup lid having at least one vent hole defined therein for providing communication between an interior space in said outer cup surrounding said inner cup and an exterior space around said outer cup, an inner cup lid for closing said inner cup, and a closure member movably mounted on said outer cup lid for selectively opening and closing said vent hole, said method comprising the steps of:

closing the outer and inner cups respectively with the outer and inner cup lids and closing said vent hole with said closure member;
rotating said inner cup to coat an object placed therein;
and
after the object is coated and before the outer cup lid is opened, opening said vent hole with said closure member thereby to provide communication between the interior space in said outer cup and the exterior space around said outer cup.

1 more element

Dependencies are inferred from the claim text.

Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus

Life of this patent

Rotary-cup coating apparatus and method of coating object with such rotary-cup coating apparatus

Life of this patent

Abstract

Claims17