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US 5,707,558 AGranted
Radiation sensitive resin composition
AssigneesJapan Synthetic Rubber Co., Ltd., Arakawa Chemical Industries, Ltd.
InventorsKatsumi Inomata, Nasahiro Akiyama, Toshiyuki Ota, Akira Tsuji
Life of this patent
Estimating the term…
Abstract
A radiation sensitive resin composition containing an alkali soluble resin and a 1,2-quinonediazide compound of a polyphenol or a radiation sensitive resin composition containing an alkali soluble resin and a 1,2-quinonediazide compound and a polyphenol compound.
Claims7
A radiation sensitive resin composition comprising an alkali soluble resin, a 1,2-quinonediazide compound and a phenol compound represented by the following formula (1B):
- ##STR13## wherein X.sub.21 to X.sub.40 and Y.sub.5 to Y.sub.8 are the same or different from one another and are selected from the group consisting of a hydrogen atom, an alkyl moiety, an alkoxyl moiety and a hydroxyl moiety, provided that at least one of X.sub.21 to X.sub.25, at least one of X.sub.26 to X.sub.30, at least one of X.sub.31 to X.sub.35, at least one of X.sub.36 to X.sub.40 and at least one of Y.sub.5 to Y.sub.8 are a hydroxyl moiety.
Dependencies are inferred from the claim text.