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US 5,707,484 AGranted
Method of accurate compositional analysis of dielectric films on semiconductors
AssigneeAdvaned Micro Devices, Inc.
InventorsJeremias D. Romero, Roger L. Alvis, Homi Fatemi
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Abstract
A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.
Claims5
A method of determining the composition of a dielectric film on a semiconductor device wherein said semiconductor device comprises a dielectric film on a semiconductor substrate, wherein said method comprises:
- removing a portion of said substrate leaving only a portion of dielectric film;
- and
- performing a compositional analysis of said portion of dielectric film.
Dependencies are inferred from the claim text.