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AssigneeCalifornia Institute of Technology
InventorsHarry A. Atwater, Ruth A. Brain, Martin B. Barmatz
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The present invention discloses a process for selectively annealing heterostructures using microwaves. A heterostructure, comprised of a material having higher microwave absorption and a material having lower microwave absorption, is exposed to microwaves in the cavity. The higher microwave absorbing material absorbs the microwaves and selectively heats while the lower microwave absorbing material absorbs small amounts of microwaves and minimally heats. The higher microwave absorbing material is thereby annealed onto the less absorbing material which is thermally isolated.
A method for selectively annealing a first material having a high microwave absorption located in close proximity to a second material with a top surface having low microwave absorption less than said high microwave absorption, comprising covering the entire top surface of said second material with said first material and exposing said first material to pulsed microwave radiation sufficient only to cause selective annealing of said first material and insufficient to cause localized heating by said microwave radiation of said second material.
A method for processing a work piece by selectively annealing a first material having higher microwave absorption located in close proximity to a second material of said workpiece having lower microwave absorption inside a cavity and including a source producing microwaves, comprising the steps of:
Dependencies are inferred from the claim text.