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US 5,705,878 AGranted
Flat scanning stage for scanned probe microscopy
OwnerAaron Lewis, Klony Liebermaninventors
Life of this patent
Estimating the term…
Abstract
A three-dimensional scanner incorporates a flat stage for receiving samples. The stage is supported in a scanning frame by four identical quadrant tube piezo-electric scanner elements. Each element is fixed at one end to a fixed chassis and is fastened at its opposite end through a connector to the scanner frame. The scanner elements are operated in pairs to move the stage in an X-Y plane, and are operated together to move the stage in a Z direction perpendicular to the X-Y plane.
Claims15
A scanning stage, comprising:
- a chassis;
- a scanning frame;
- four quadranted cylindrical piezoelectric elements coplanar with said frame connected to support said scanning frame on said chassis, said elements being spaced around said frame with each element being perpendicular to its next adjacent elements, each said element having a first end and a second end, the first end of each element being fixedly connected to said chassis;
- and
- connecting joints connected between the second end of each element and said scanning frame whereby bending of said elements produces orthogonal scanning of said scanning frame with respect to said chassis.
2 more elements
Dependencies are inferred from the claim text.