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US 5,704,667 AGranted
High-strength transport supporting frame
AssigneeUnited Microelectronics Corp.
InventorYu-Tsai Lin
Life of this patent
Estimating the term…
Abstract
A high-strength transportation frame for carrying wafer boats between processing stations in a semiconductor fabrication facility includes a pair of transporting rods each having a corresponding grip portion, a number of fixing elements, and a pair of connecting rods. The connecting rods extend parallel to each other and are connected to each of the pair of transporting rods at remote ends thereof, the connections being secured by the fixing elements.
Claims7
A transport supporting frame for carrying a wafer boat, comprising:
- a pair of essentially parallel transporting rods, each rod being composed of first and second contiguous, longitudinally extending regions, each first region having a respective grip surrounding a portion thereof;
- a pair of connecting rods which extend parallel to each other and are connected at ends thereof to the respective first regions of the pair of transporting rods, with each respective grip being disposed between respective ends of the pair of connecting rods;
- and
- a pair of first and second support rods and respective sleeves, connected to the respective second regions of said transporting rods, the second regions being free of a direct connection together so that a wafer boat may be received and carried by said support rods and sleeves.
1 more element
Dependencies are inferred from the claim text.