Positive photoresist composition
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsSatoshi Niikura, Takako Suzuki, Kousuke Doi, Hidekatsu Kohara, Toshimasa Nakayama
Life of this patent
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Abstract
A positive photoresist composition comprising: (A) an alkali-soluble resin; (B) a quinone diazide group-containing compound; and (C) at least one compound selected from the polyhydroxy compounds, such as 1,3-bis2-(5-cyclohexyl-2-methyl-4-hydroxyphenyl)-2-propyl!benzene. The composition of the present invention exhibits excellent image contrast between exposed portions and unexposed portions, and actualizes formation of a resist pattern with excellent resolution, exposure range, and focal depth range.
Claims9
A positive photoresist composition comprising:
- (A) an alkali-soluble resin;
- (B) a quinone diazide group-containing compound;
- and
- (C) at least one compound selected from the polyhydroxy compounds expressed by the following general formula (I), ##STR6## wherein each of R.sup.1 and R.sup.2 is independently selected from a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, and a halogen atom.
The positive photoresist composition according claim further comprising at least one compound selected from:
- hydroxyaryl compounds expressed by the following formula (II), ##STR7## wherein each of R.sup.3 to R.sup.5 is independently selected from a hydrogen atom and an alkyl group having 1 to 4 carbon atoms;
- each of R.sup.6 to R.sup.11 is independently selected from a hydrogen atom, a halogen atom, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, an alkenyl group having 2 to 4 carbon atoms, and a cycloalkyl group having 5 to 8 carbon atoms;
- each of R.sup.12 and R.sup.13 is independently selected from a hydrogen atom, a halogen atom, and an alkyl group having 1 to 4 carbon atoms;
- each of x, y, and z is an integer independently selected from 1, 2, and 3;
- and n' is 0 or 1;
- and,
- hydroxyaryl compounds expressed by the following formula (III), ##STR8## wherein each of R.sup.14 to R.sup.17 is independently selected from a hydrogen atom and an alkyl group having 1 to 4 carbon atoms;
- each of R.sup.18 to R.sup.22 is independently selected from a hydrogen atom, a halogen atom, and an alkyl or alkoxy group having 1 to 4 carbon atoms;
- and each of l', m', x' and y' is an integer independently selected from 1, 2, and 3.
Dependencies are inferred from the claim text.