Particulate free vacuum compatible pinch seal

A sealing device comprising:

• a flexible sealing member positioned in an elongated opening in a barrier wall for preventing particles from passing through the elongated opening;
• a support member extending through the elongated opening and mounted for movement along a length of the elongated opening;
• and
• an opening device attached to the support member for opening the flexible sealing member, the opening device preventing contact between the flexible seal and the support member as the support member moves along the length of the opening while providing an effective particle barrier.

A method of shielding a substrate from non-localized particle sources comprising:

• providing a substrate in a working environment separated from an actuating mechanism by a shielding member, the actuating mechanism moving a member supporting the substrate while the member extends through an elongated flexible seal sealing an elongated opening in the shielding member;
• forming an open area around the member by selectively opening and closing portions of the elongated flexible seal while moving the member along the opening through the open area in the flexible seal;
• and
• reducing particle generation by preventing contact between the flexible seal and the member moving through the open area in the flexible seal while retaining the isolating function of the shielding member.