A radiation ray sensitive resin composition comprising a water-insoluble, alkali-soluble resin, a water-insoluble, alkali-soluble low-molecular compound and a radiation ray sensitive component, wherein 50% or more of said radiation ray sensitive component is, a mixture composed of (A) at least one naphthoquinonediazide sulfonic acid diester of water-insoluble, alkali-soluble low-molecular compounds having three and/or four phenolic hydroxyl groups of the following formulae (A1) to (A4) and (B) a naphthoquinonediazide sulfonic acid ester of a water-insoluble, alkali-soluble low-molecular compound having from 5 to 7 phenolic hydroxyl groups of the following general formula (B1), wherein said ester (B) is obtained by esterification reaction of a naphthoquinonediazide sulfonic acid with a water-insoluble, alkali-soluble low-molecular compound having from 5 to 7 phenolic hydroxyl groups and having the proportion of the naphthoquinonediazide sulfonyl groups in all hydroxyl groups of from 10 to 60%:
- ##STR10## wherein;
- R.sub.1 to R.sub.8 and R.sub.20 to R.sub.24 each represent a hydrogen atom, --CN, --X--R.sub.a1 or a halogen atom;
- X.sub.1 and X.sub.2 each represent a single bond, a carbonyl group, a sulfido group, a sulfonyl group, or --C(R.sub.b1)(R.sub.b2)--;
- provided that, when 1 is 0, then X.sub.1 represents a group of the following general formula (A.sub.11) or (A.sub.12):
- ##STR11## X.sub.3 represents a group of the following general formula (A.sub.21) or (A.sub.22):
- ##STR12## R.sub.9, R.sub.12 to R.sub.17, R.sub.25 to R.sub.31, R.sub.b1 and R.sub.b2 each represent a hydrogen atom, a methyl group, an ethyl group, or a haloalkyl group having one or two carbon atoms;
- R.sub.b1 and R.sub.b2 ;
- R.sub.25 and R.sub.26 ;
- R.sub.28 and R.sub.29 ;
- and R.sub.30 and R.sub.31 each may be bonded to each other to form an alicyclic hydrocarbon residue;
- R.sub.10, R.sub.11, R.sub.a3, R.sub.a4, R.sub.18 and R.sub.19 each represent a hydrogen atom, --X--R.sub.a1, --CN or a halogen atom;
- X represents a single bond, --O--, --S--, --CO--, --OCO--, or --N(R.sub.a1)--CO--;
- Xa represents a carbonyl group, a sulfido group, a sulfonyl group, or --C(R.sub.b1)(R.sub.b2)--;
- R.sub.a1 represents an alkyl, aryl or aralkyl group having from 1 to 10 carbon atoms;
- Z.sub.1 represents a single bond, or it is bonded to CR.sub.9 to form a tri-valent alicyclic hydrocarbon residue;
- Z.sub.2 represents a single bond, or --O--;
- k and 1 each represent 0 or 1;
- m and n each represent 1 or 2;
- q represents an integer of from 1 to 8;
- r and s each represent 1 or 2, provided that (r+s) is 3;
- D.sub.1 to D.sub.7 each represent a hydrogen atom, or a naphthoquinonediazido-4 or 5-sulfonyl group;
- R.sub.32 to R.sub.46 and R.sub.49 each represent a hydrogen atom, --CN, --X--R.sub.a1, or a halogen atom;
- R.sub.47 represents a hydrogen atom, a methyl group, an ethyl group, a haloalkyl group having one or two carbon atoms, or Rc;
- Rc represents a group of the following general formula (A.sub.41):
- ##STR13## R.sub.48 represents a hydrogen atom, a methyl group, an ethyl group, a haloalkyl group having one or two carbon atoms, or Rd;
- Rd represents a group of the following general formula (A.sub.42):
- ##STR14## R.sub.50 and R.sub.51 each represent a hydrogen atom, --CN, --X--R.sub.a1, or a halogen atom;
- provided that, when R.sub.47 .noteq.c and is Rd, then they each are Rc;
- X.sub.4 to X.sub.6 each represent a single bond, a carbonyl group, a sulfido group, a sulfonyl group, or --C(R.sub.b1)(R.sub.b2)--;
- X.sub.7 and X.sub.8 each represent a single bond, or a group of --(CR.sub.160 R.sub.61).sub.u (CH.dbd.CH).sub.v ;
- R.sub.52 to R.sub.59 and R.sub.a5 to R.sub.a7 each represent a hydrogen atom, --CN, --X--R.sub.a1, or a halogen atom;
- R.sub.60 and R.sub.61 each represent a hydrogen atom, a methyl group, an ethyl group, or a haloalkyl group having one or two carbon atoms;
- Z.sub.3 represents a tetra-valent alkyl residue having from 1 to 6 carbon atoms;
- D.sub.8 to D.sub.16 each represent a hydrogen atom, or a naphthoquinonediazido-4 or 5-sulfonyl group;
- t represents 0 or an integer of 1 or 2;
- u and x each represent 0 or an integer of from 1 to 8;
- y, v and w each represent 0 or 1;
- provided that, when R.sub.47 .noteq.Rc and R.sub.50 .noteq.Rc and R.sub.51 .noteq.Rc, then y=1 and w=1, while in the other cases, y=0;
- and
- two of D.sub.1 to D.sub.16 are naphthoquinonediazido-4 or 5-sulfonyl groups in one molecule of each of these radiation ray sensitive compounds of formulae (A1) to (A4):
- ##STR15## wherein;
- R.sub.62 to R.sub.82 each represent a hydrogen atom, --CN, --X--R.sub.a1, or a halogen atom;
- X.sub.9 to X.sub.14 each represent a single bond, a carbonyl group, a sulfido group, a sulfonyl group, or a group of --C(R.sub.b1)(R.sub.b2)--;
- D.sub.17 to D.sub.23 each represent a hydrogen atom, or a naphthoquinonediazido-4 or 5-sulfonyl group;
- R.sub.a1 represents an alkyl, aryl or aralkyl group having from 1 to 10 carbon atoms;
- R.sub.b1 and R.sub.b2 each represents a hydrogen atom, a methyl group, an ethyl group, or a haloalkyl group having one or two carbon atoms;
- and R.sub.b1 and R.sub.b2 may be bonded to each other to form an alicyclic residue;
- and
- i and j each represent 0 or 1.