Integrated circuit wafer container
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorWen-Sheng Liang
Life of this patent
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Abstract
An improved container for storing large diameter semiconductor wafers. The container has a body member and an enclosure member that are secured together with complimentary threaded portions. The top of the enclosure member has a circular upstanding flange spaced from a circular upstanding protrusion. Upstanding radially ribs are provided between the flange and protrusion to strengthen the enclosure member and provide a means for engagement with a wrench that will apply a torque force.
Claims9
An improved integrated circuit wafer container for storing large diameter integrated circuit wafers therein, having an enclosure member and a body member, the body member having a base with spaced longitudinally directed portions adapted to encircle and hold wafers stacked on the base, the enclosure member having a circular shaped top wall and a cylindrical shaped side wall that encompasses and encircles the longitudinally directed portions of the body members, a threaded portion on the lower end of the cylindrical wall that engages with a complimentary threaded portion on the base that selectively secures the enclosure member to the body member, the improvement comprising,
- an upwardly extending thick concentric circular flange on said circular shaped top wall adjacent the periphery of said top wall, a central upwardly extending protrusion on the top wall, and a plurality of radially extending ribs between said circular flange and said central protrusion.
Dependencies are inferred from the claim text.