High performance horizontal diffusion furnace system
AssigneeThermtec, Inc.
InventorsKevin B. Peck, Ronald E. Erickson, Stephen H. Matthews
Life of this patent
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Abstract
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.
Claims18
An apparatus for enhancing the heat treatment process in a high temperature furnace, comprising:
- a substantially cylindrical element with a load end, the substantially cylindrical element having a furnace chamber with a furnace heating element to provide heat and surrounding a process chamber with an opening at the load end;
- a thin element liner between the process chamber and the furnace chamber to allow uniform heating in the process chamber;
- and
- wherein the thin element liner comprises silicon carbide coated onto a support structure.
An apparatus, comprising:
- a substantially cylindrical horizontal element having a furnace chamber surrounding a process chamber;
- and
- an element liner between the process chamber and the furnace chamber, wherein the element liner comprises silicon carbide coated onto a support structure.
A furnace comprising:
- a furnace chamber;
- a process chamber;
- said furnace chamber surrounding said process chamber;
- a liner located between the process chamber and the furnace chamber;
- and
- wherein the liner comprises silicon carbide coated onto a support structure.
Dependencies are inferred from the claim text.