Diamond film structures and methods related to same
AssigneeMichigan State University
InventorsMohammad Aslam, James V. Beck
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Abstract
Novel structures are provided including laminated layers of the diamond film in different patterns for conducting, generating and/or absorbing thermal energy. In particular, a thermal sensor/heater is shown including a doped electrically conductive diamond film layer encapsulated by layers of undoped electrically insulative layers on a silicon wafer. Also, a GaAs/Si on diamond laminate structure is provided in which the diamond film acts as a substrate and a heat sink. Notably, the diamond film structures are characterized by their high thermal conductivity, high chemical resistance, and high hardness/wear resistance due to the properties of the diamond films.
Claims11
A method of heating and sensing temperature comprising steps of:
- providing a substrate including a surface and a temperature-sensitive structure attached to said surface, said temperature-sensitive structure including an electrically conductive diamond film having an electrical resistivity that characteristically changes in response to temperature change;
- applying an electrical source having a voltage to said temperature-sensitive structure in order to induce a current through said conductive diamond film to thereby heat said temperature-sensitive structure and the substrate surface to an elevated operating temperature;
- and
- determining one of an actual temperature and a relative temperature change based on said characteristic electrical resistivity of said conductive diamond film by sensing a change in one or both of said voltage and said current.
A method of heating and sensing temperature comprising steps of:
- heating a substrate to an elevated operating temperature by applying an electrical source having a voltage to an electrically conductive doped diamond film positioned on a surface of the substrate;
- and
- determining the temperature of the substrate at the surface by measuring a voltage differential across the conductive doped diamond film.
A method of heating and sensing temperature comprising steps of:
- applying an electrically conductive doped diamond film to an area of a substrate surface that requires heating to a predetermined minimum elevated operating temperature before use, the conductive doped diamond film defining a predetermined pattern and area configured to uniformly heat the area;
- heating the selected area of the substrate surface to a substantially elevated and stable operating temperature by applying an electrical source having a voltage to the electrically conductive doped diamond film;
- thereafter determining the temperature of the substrate at the surface by measuring a voltage differential across the conductive doped diamond film;
- and
- repeating the steps of heating and determining temperature at least once and until the elevated operating temperature is reached and has stabilized.
Dependencies are inferred from the claim text.