Process and apparatus for contamination-free processing of semiconductor parts
AssigneeInternational Business Machines Corporation
InventorsNunzio DiPaolo, Daniel J. Ferguson
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Abstract
This invention relates generally to a process and apparatus for contamination-free processing of semiconductor parts. More specifically, this invention relates to a process and apparatus for contamination-free processing of semiconductor parts in an oven or a furnace. This invention also relates to a process and apparatus for contamination-free processing of semiconductor parts in a furnace, such as a belt type furnace that sequentially stops the belt at the vicinity of at least one heating or cooling unit to heat or cool the part.
Claims12
A process for treating a part in a second environment wherein said part is protected from said second environment, comprising the steps of:
- (a) placing said part on a part carrier in a first environment,
- (b) placing a cover over said part carrier and enveloping said part to form a boat wherein at least one of said cover and said part carrier has embedded resistance heating means,
- (c) removing said boat from said first environment, and
- (d) placing said boat in said second environment for treating said part wherein said second environment has more contamination than said first environment.
Dependencies are inferred from the claim text.