High performance horizontal diffusion furnace system
AssigneeThermtec, Inc.
InventorsKevin B. Peck, Ronald E. Erickson, Stephen H. Matthews
Life of this patent
Estimating the term…
Abstract
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.
Claims24
An apparatus for enhancing the heat treatment process in a high temperature furnace, comprising:
- a substantially cylindrical element with a load end, the substantially cylindrical element having a furnace chamber with e furnace heating element to provide heat and surrounding a process chamber with an opening at the load end;
- a thin element liner between the process chamber and the furnace chamber to allow uniform heating in the process chamber;
- and
- wherein the thin element liner comprises a ceramic fiber and silicon carbide composite.
An apparatus for enhancing the heat treatment process in a high temperature furnace, comprising:
- a substantially cylindrical element with a load end, the substantially cylindrical element having a furnace chamber with a furnace heating element to provide heat and surrounding a process chamber with an opening at the load end;
- an element liner between the process chamber and the furnace chamber to allow uniform heating in the process chamber;
- and
- wherein the element liner comprises silicon carbide impregnated ceramic fiber.
An apparatus for enhancing the heat treatment process in a high temperature furnace, comprising:
- a substantially cylindrical element with a load end, the substantially cylindrical element having a furnace chamber with a furnace heating element to provide heat and surrounding a process chamber with an opening at the load end;
- a thin element liner between the process chamber and the furnace chamber to allow uniform heating in the process chamber;
- and
- wherein the thin element liner is a black body susceptor comprising a ceramic fiber and silicon carbide composite.
An apparatus, comprising:
- a substantially cylindrical horizontal element having a furnace chamber surrounding a process chamber;
- and
- an element liner between the process chamber and the furnace chamber, wherein the element liner comprises a ceramic fiber and silicon carbide composite.
A furnace providing heat treatment of a semiconductor wafer, comprising:
- a substantially cylindrical horizontal element having a furnace chamber, surrounding a process chamber, the furnace chamber having a furnace heating element to provide heat during a heat treatment process;
- and
- a thin element liner positioned between the process chamber and the furnace chamber to allow uniform heating of the semiconductor wafer in the process chamber, wherein the thin element liner comprises a ceramic fiber and silicon carbide composite.
A horizontal diffusion furnace system, comprising:
- a plurality of substantially cylindrical elements (1) having respective furnace chambers each with a heating element to provide heat and (2) surrounding respective process chambers;
- and
- a plurality of element liners positioned between the respective process chambers and respective furnace chambers to allow uniform heating in respective process chambers;
- and
- wherein a first element liner comprises a ceramic fiber and silicon carbide composite.
An apparatus for enhancing the heat treatment process in a high temperature furnace, comprising:
- a substantially cylindrical element with a load end, the substantially cylindrical element having a furnace chamber with e furnace heating element to provide heat and surrounding a process chamber with an opening at the load end;
- a thin element liner between the process chamber and the furnace chamber to allow uniform heating in the process chamber;
- and
- wherein the thin element liner has a width of less than 3 millimeters.
A horizontal diffusion furnace system, comprising:
- a plurality of substantially cylindrical elements each having a furnace chamber with a heating element to provide heat and surrounding a process chamber;
- a plurality of element liners each being positioned between one of said process chambers and one of said furnace chambers to allow uniform heating in one of said process chambers;
- and
- wherein each of said element liners has a width of less than 3 millimeters.
A horizontal diffusion furnace comprising:
- a cylindrical element having a furnace chamber with a heating element to provide heat and surrounding a process chamber;
- an element liner positioned between the process chamber and the furnace chamber to allow uniform heating in the process chamber;
- and
- wherein the element liner has a width of less than 3 millimeters.
Dependencies are inferred from the claim text.