Selected structurally defined novolak binder resins and their use in radiation-sensitive compositions
AssigneeOCG Microelectronic Materials, Inc.
InventorsThomas R. Sarubbi, Joseph J. Sizensky
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AssigneeOCG Microelectronic Materials, Inc.
InventorsThomas R. Sarubbi, Joseph J. Sizensky
Estimating the term…
A novolak resin composition comprising at least one unit of the reaction product of a para-, para-bonded bisphenol having formula (A): ##STR1## wherein R.sub.1 =hydrogen, lower alkyl group having 1-4 carbon atoms, halogen, or lower alkoxy group having 1-4 carbon atoms; wherein R.sub.2 =hydrogen or lower alkyl group having 1-4 carbon atoms; and wherein X is selected from the group consisting of: CH.sub.2, CH(CH.sub.3), C(CH.sub.3).sub.2, O, and S; with a bismethylol monomer selected from a difunctional ortho-, ortho-phenolic bismethylol of Formula (B), a difunctional ortho-, para-phenolic bismethylol of Formula (C): ##STR2## wherein R.sub.3 is selected from CH.sub.3, CH.sub.2 CH.sub.3, Cl, and Br; and wherein R.sub.4 is selected from H and CH.sub.3.
A novolak resin composition consisting of the reaction product of a para-, para-bonded bisphenol having formula (A):
Dependencies are inferred from the claim text.