Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus
AssigneeLeybold Aktiengesellschaft
InventorPeter Mahler
Life of this patent
Estimating the term…
Abstract
A flat rectangular substrate bed (3) having opposed parallel endwalls (14) and parallel sidewalls (16) receives a pair of clamping jaws (4) each having an L-shaped cross-section with a short limb against each sidewall and a long limb extending halfway over the top surface of the substrate bed. The long limbs (6) have arcuate recesses (7) which cooperate to surround the substrates (2) and thereby center and hold them. The two clamping jaws (4) are held by end bars (11) which are tightly joined to the substrate bed (3) by means of pins (10) and (12) received in respective bores (9) in the jaws and (13) in the endwalls.
Claims7
Apparatus for holding disk-shaped substrates, said apparatus comprising
- a flat rectangular substrate bed having a top surface, parallel opposed endwalls, and parallel opposed sidewalls,
- a pair of clamping jaws each having an L-shaped cross section with a short limb fitted against a respective sidewall, a long limb extending halfway over said top surface, and a pair of opposed ends, each said long limb having a plurality of semi-circular recesses which cooperate with respective said recesses of the other said limb to hold respective said substrates therebetween, and
- means for positioning said clamping jaws firmly with respect to said substrate bed.
Dependencies are inferred from the claim text.